School of Mechanical Engineering Seminar
Wednesday, May 25, 2022, at 14:00
Wolfson Building of Mechanical Engineering, Room 206
MEMS Flow Sensor -
Examination of flow directions, heat, and bifurcation.
Dan Refaeli
M.Sc. student of Prof. Alex Liberzon and Prof. Slava Krylov.
Microelectromechanical (MEMS) flow sensors are distinguished by small size, low cost, and low power consumption and are indispensable in applications ranging from scientific instruments for turbulence research to autonomous flying robots and medical tools. Most of the existing flow sensors are either hot wires based on the heat exchange with the environment or mechanical devices relying on the aerodynamic forces measurements.
Recently our team reported on a novel sensor, which combines both thermal and mechanical measurement principles. We proposed a bistable MEMS structure as a flow sensor, with a novel flow sensing approach based on buckling monitoring of a micro-beam. It is a micro double clamped beam, initially curved. The buckling and return, which are the transitions between the two equilibrium points, occur by electrostatic attraction and electrothermal heating (called Joule's heating). This device, located within a flow field, can receive information about the flow. The air stream, convectively cooling the device, affects the voltage's critical buckling values and the post-buckling deflections of the structure. After calibration, we can obtain the flow velocity from the deflection measurements.
The purpose of the current study is to examine additional effects on sensor operation: Joule's heating, different flow directions, dynamical phenomena, and resonance. In this work, we present a set of experiments and their results.
Join Zoom Meeting
https://us02web.zoom.us/j/82108132163?pwd=Z2h4UzNzUS9mbXplT0lMU1pZenFEQT09
Wednesday, May 25, 2022, at 14:00
